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Precision Analysis of Micro-topography Decoding the Material's Surface Cipher

CE PROFILE MEASURINGINSTRUMENT

Precision Analysis of Micro-topography Decoding the Material's Surface Cipher
Measurement Case
Performance Metrics
Project CE
Measurement Range X-axis 0-300mm
X-axis resolution 0.1μm
Z-axis 30-60mm
Profile Sensor Z1-axis range 0.02μm
Z1 resolution ≤±(0.8+|0.05H|)μm
Z1 linear accuracy ±(2+R/8)μm
Profile Accuracy Arc ±2′
Angle 0.5μm/100mm(Cut-off wavelength 2.5)
Straightness Electric
Drive Speed X-axis drive method Electric
Z-axis drive method 0.5mm/s
Fastest measurement speed 500mm×800mm
Marble scale Natural marble
Table surface material 420, 620mm Optional
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